| No | Category | Tool Name | Maker | Model | Size | Vintage | REMARKS |
| 1 | LITHOGRAPHY | COATER/DEVELOPER | TEL | LITHIUS I + | 12 | | 5C5D |
| 2 | LITHOGRAPHY | COATER | MESETEK | VFC-8000 | | | |
| 3 | DEPOSITION | SPUTTER | ULVAC | ZI-1000 | 8 | | |
| 4 | ETCHER | ETCHER | M-SETEK | VE-8000 | | | |
| 5 | ETCHER | ETCHER | SHIBAURA | CDE-80 | 8 | | |
| 6 | ETCHER | ETCHER | CI SCIENCE | TORUS 200 | 8 | | |
| 7 | METROLOGY | DEPTH MEASURE | KLA | P22 | 8 | | SN:02970118 |
| 8 | METROLOGY | RESISTANCE MEASURE | KLA | RS35 | | | |
| 9 | ASSEMBLY | PLATING | EBARA | UFP-200A | | | |
| 10 | ASSEMBLY | WIRE BONDER | K&S | MAXUM | | | |
| 11 | ASSEMBLY | WIRE BONDER | K&S | MAXUM PLUS | | | |
| 12 | ASSEMBLY | WIRE BONDER | K&S | MAXUM Ultra | | | |
| 13 | MODULE | Robot | JEL | 800slit | | | |
| 14 | MODULE | Robot | JEL | GHR4206-320-PM-03858 | | | SN:11001026 |
| 15 | MODULE | Chiller | AMAT | AMAT-1 | | | |
| 16 | MODULE | Chiller | NESLAB | STEELHEAD-0 | | | |
| 17 | MODULE | Chiller | NESLAB | STEELHEAD-1 | | | |
| 18 | MODULE | Chiller | NESLAB | STEELHEAD-3 | | | |
| 19 | MODULE | Chiller | NESLAB | STEELHEAD-5 | | | |
| 20 | MODULE | Chiller | NESLAB | HX-150 | | | |
| 21 | MODULE | Chiller | SMC | INR-244-602A | | | |
| 22 | MODULE | Chiller | SMC | INR-497-001 | | | |
| 23 | MODULE | Chiller | SMC | INR-496-003D | | | |
| 24 | MODULE | Chiller | RASCO | WTC-D188-ANL | | | |
| 25 | MODULE | Chiller | TAITEC | SC-80 | | | |
| 26 | MODULE | Chiller | SHINWA | CH1-CP-D6 | | | |
| 27 | MODULE | Chiller | LASEMTECH | BCU-L252RSU2-TEAM | | | |
| 28 | MODULE | Chiller | RISSHI | Y-8020SC | | | |
| 29 | MODULE | Chiller | AFFINITY | PWA-000L-DD39CBD3 | | | |
| 30 | OTHERS | OVEN | C-SUN | MOL-2 | | | |
| 31 | OTHERS | OVEN | YES | 5112 | | | |
| 32 | OTHERS | BOX CLEANER | DMS | M310A | | | |
